A comparative study of self-heating effect of nMOSFETs fabricated on SGOI and SGSOAN substrates
Document Type
Article
Publication Date
12-1-2010
Abstract
In this work, for the first time, the electrical and thermal characteristics of strained Si/SiGe nanoscale n type metal-oxide-silicon field-effect transistors (MOSFETs) with silicon-on-aluminum nitride (SOAN) substrate are investigated by ISE TCAD. This novel structure is named as SGSOAN nMOSFET. A comparative study of self-heating effect (SHE) of nMOSFETs fabricated on SGOI and SGSOAN are presented in this paper. Numerical study results show that this novel SGSOAN structure can greatly eliminate excessive self-heating in devices, which gives a more promising application for SGOI to work at high temperature. © 2010 Elsevier Ltd. All rights reserved.
Publication Source (Journal or Book title)
Microelectronics Reliability
First Page
1942
Last Page
1950
Recommended Citation
Liu, H., Li, B., Li, J., & Yuan, B. (2010). A comparative study of self-heating effect of nMOSFETs fabricated on SGOI and SGSOAN substrates. Microelectronics Reliability, 50 (12), 1942-1950. https://doi.org/10.1016/j.microrel.2010.05.013