Scalable fabrication of sub-10 nm polymer nanopores for DNA analysis

Authors

Junseo Choi, Department of Mechanical & Industrial Engineering and Center for BioModular Multiscale Systems for Precision Medicine, Louisiana State University, Baton Rouge, LA 70803 USA.
Charles C. Lee, Department of Comparative Biomedical Sciences, School of Veterinary Medicine, Louisiana State University, Baton Rouge, LA 70803 USA.
Sunggook Park, Department of Mechanical & Industrial Engineering and Center for BioModular Multiscale Systems for Precision Medicine, Louisiana State University, Baton Rouge, LA 70803 USA.

Document Type

Article

Publication Date

1-1-2019

Abstract

We present the first fabrication of sub-10 nm nanopores in freestanding polymer membranes via a simple, cost-effective, high-throughput but deterministic fabrication method. Nanopores in the range of 10 nm were initially produced via a single-step nanoimprinting process, which was further reduced to sub-10 nm pores via a post-NIL polymer reflow process. The low shrinkage rate of 2.7 nm/min obtained under the conditions used for the reflow process was the key to achieving sub-10 nm pores with a controllable pore size. The fabricated SU-8 nanopore membranes were successfully employed for transient current measurements during the translocation of DNA molecules through the nanopores.

Publication Source (Journal or Book title)

Microsystems & nanoengineering

First Page

12

Recommended Citation

Choi, J., Lee, C. C., & Park, S. (2019). Scalable fabrication of sub-10 nm polymer nanopores for DNA analysis. Microsystems & nanoengineering, 5, 12. https://doi.org/10.1038/s41378-019-0050-9