Fabrication of 3-D superhydrophobic micro-ratchets via combined thermal imprint lithography and photolithography
Document Type
Conference Proceeding
Publication Date
1-1-2009
Abstract
Ratcheted structures with superhydrophobicity have potential to drive motion of liquid drops in microfluidic devices. We report development of a new process to integrate microscale pillars with varied periods of ratchets from sub-micrometer to 1.5 mm in SU-8. For the fabrication, an hierarchical mixed process of thermal imprint lithography and optical UV-lithography was employed. Use of Ni ratchets as stamps and a hydrophobic silane coating on the stamp surfaces significantly improved imprinting performance into SU-8. We have successfully demonstrated fabrication of ratcheted micropillars as well as submicromcter ratchets integrated into micropillars. In addition, we will discuss optimization of the SU-8 imprinting process and the air gap compensation for photolithography of ratcheted SU-8 layers, which are essential for the fabrication. Copyright © 2008 by ASME.
Publication Source (Journal or Book title)
ASME International Mechanical Engineering Congress and Exposition, Proceedings
First Page
785
Last Page
790
Recommended Citation
Jeong, T., Lopez-Oña, E., Park, D., Wong, H., & Park, S. (2009). Fabrication of 3-D superhydrophobic micro-ratchets via combined thermal imprint lithography and photolithography. ASME International Mechanical Engineering Congress and Exposition, Proceedings, 13 (PART B), 785-790. https://doi.org/10.1115/IMECE2008-67880
