Low temperature deposition of carbon nanotubes
Document Type
Conference Proceeding
Publication Date
6-15-2009
Abstract
We introduce a novel method for low substrate temperature carbon nanotube (CNT) deposition utilizing photo-chemical vapor deposition (PCVD). Aluminum and nickel catalyst layers are deposited on thermally oxidized silicon substrates for CNT growth. The catalyst layers of varying thicknesses are deposited by electron beam evaporation. Different catalyst annealing temperatures and pressures are investigated. The CNT deposition is carried out immediately following the annealing process. The presence of light source during CNT deposition assists in fragmentation of the CCl4 precursor molecules used, thereby permitting a lower substrate temperature during growth. We have successfully deposited CNTs at substrate temperatures as low as 400 °C by this technique. © 2009 SPIE.
Publication Source (Journal or Book title)
Proceedings of SPIE - The International Society for Optical Engineering
Recommended Citation
Kang, K., Jin, Y., Ajmera, P., & Park, S. (2009). Low temperature deposition of carbon nanotubes. Proceedings of SPIE - The International Society for Optical Engineering, 7291 https://doi.org/10.1117/12.815578
