Fabrication of cost-effective polymer-based nanofluidic device for single molecular analysis
Document Type
Conference Proceeding
Publication Date
1-1-2010
Abstract
A nanochannel based single molecular sensor was fabricated in poly(methyl methacrylate) substrate by a single step imprinting process with a polymer stamp. The sensor structure consists of hierarchical multiscale patterns of an array of 90 nm (depth) 190 nm (width) 80 μm (length) nanochannels and microfluidic networks. In contrast to nanofluidic devices fabricated by high-end nanofabrication tools such as focused ion beam milling and electron beam lithography, this direct imprint process is more desirable for efficient and low cost fabrication. Moreover, due to the reduction of stress generated during imprinting, this polymer stamp imprinting process can also reduce the deformation (warping) in molded substrates, and prevent the damage of expensive nanostructured stamp as well. Copyright © 2010 by ASME.
Publication Source (Journal or Book title)
ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
First Page
891
Last Page
897
Recommended Citation
Wu, J., Chantiwas, R., Soper, S., & Park, S. (2010). Fabrication of cost-effective polymer-based nanofluidic device for single molecular analysis. ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), 10, 891-897. https://doi.org/10.1115/IMECE2010-38885
