Intrinsic stresses and mechanical properties of Ti-containing hydrocarbon coatings

Document Type

Article

Publication Date

7-1-2003

Abstract

A report on intrinsic stresses and mechanical properties of Ti-containing hydrocarbon coatings was presented in the article. It was found that the intrinsic compression within Ti-C:H depends on the Ti composition and related to percolation type transition in the nanoscale structure. It was also shown that the intrinsic compression within Ti-C:H is influenced by the energy of ionic species bombarding the substrate during growth.

Publication Source (Journal or Book title)

Journal of Applied Physics

First Page

186

Last Page

194

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