Fabrication of metal-based high-aspect-ratio microscale structures by compression molding

Document Type

Article

Publication Date

7-10-2008

Abstract

Metal-based high-aspect-ratio microscale structures (HARMSs) are basic building blocks for metallic microdevices such as microelectromagnetic relays and microchannel heat exchangers. Metallic microdevices may have advantages over Si-based devices when subjected to high stresses, high temperatures, and other harsh conditions. In this article, the authors summarize our recent results on molding replication of metal-based HARMS. The micromolding response was experimentally measured in Al and Cu, and rationalized with companion high-temperature tensile testing and finite element analysis. Successful replication of Ni-based and NiTi-based HARMS was demonstrated. © 2008 American Vacuum Society.

Publication Source (Journal or Book title)

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

First Page

745

Last Page

751

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