Dependence of confined plastic flow of polycrystalline Cu thin films on microstructure

Document Type

Article

Publication Date

9-1-2016

Abstract

Axial compression was conducted on micro-pillars, in which polycrystalline Cu thin films were sandwiched between CrN and Si. Plastic flow of Cu was achieved, when the Cu films are inclined either at 90° or 45° with respect to the pillar axis. The texture of Cu films was altered by changing the template on which film growth occurred. The Cu microstructure was further altered by post-deposition annealing. The flow stress shows little dependence on the film texture in the as-deposited state. However, annealing influences the flow stress of confined Cu films significantly. The implications on strain gradient plasticity models are discussed.

Publication Source (Journal or Book title)

MRS Communications

First Page

289

Last Page

294

This document is currently not available here.

Plum Print visual indicator of research metrics
PlumX Metrics
  • Citations
    • Citation Indexes: 21
  • Usage
    • Abstract Views: 1
  • Captures
    • Readers: 14
see details

Share

COinS