Influence of indium composition on the surface morphology of self-organized InxGa1-xAs quantum dots on GaAs substrates

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Incursive chiGa1-cursive chiAs self-organized quantum dots with cursive chi = 1.0, 0.5, and 0.35 have been grown by molecular beam epitaxy. The areal density, distribution, and shapes have been found to be dependent on cursive chi. The dot shape changes from a round shape for cursive chi = 1.0 to an elliptical shape for cursive chi≤0.5. The major axis and minor axis of the elliptical Incursive chiGa1-cursive chiAs dots are along the [110] and [110] directions, respectively. The ordering phenomenon is also discussed. It is suggested that the dot-dot interaction may play important roles in the self-organization process. © 2000 American Institute of Physics.

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Journal of Applied Physics

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