Prototype microactuators driven by magnetostrictive thin films
Document Type
Article
Publication Date
12-1-1998
Abstract
Si microcantilevers coated with giant magnetostrictive Sih-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length) × 1.0 mm (width) × 13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm42.7Fe56.9B0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved in the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications. © 1998 IEEE.
Publication Source (Journal or Book title)
IEEE Transactions on Magnetics
First Page
2039
Last Page
2041
Recommended Citation
Lim, S., Han, S., Kim, H., Choi, Y., Choi, J., & Ahn, C. (1998). Prototype microactuators driven by magnetostrictive thin films. IEEE Transactions on Magnetics, 34 (4 PART 1), 2039-2041. https://doi.org/10.1109/20.706785
