Relation between crystal structure and infrared optical properties of ErF3 film

Document Type

Article

Publication Date

5-1-2007

Abstract

In this article, thermal evaporation technology was employed to deposit erbium fluoride films on germanium (111) substrates. XRD diffraction pattern shows that films turn from amorphous to crystalline with the increase of substrate temperature. Correspondingly, the morphology and infrared optical properties change obviously. The infrared transmission spectrum of the partially crystalline film is homologous to the totally amorphous film but not the crystalline films. Crystal lattice parameters calculation indicates that there is great compression thermal stress in the erbium fluoride film deposited at high deposition temperature. The refractive indices and extinction coefficients of the films were calculated by fitting the infrared transmission spectrum using Lorentz oscillator model. The refractive index and extinction coefficients at l0μm for the amorphous erbium fluoride film are n = 1.38 and k = 0.01, and for crystalline films are n = 1.32 and k = 0.006, respectively.

Publication Source (Journal or Book title)

Wuli Xuebao/Acta Physica Sinica

First Page

2541

Last Page

2546

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