Experimental study of rotating disk type SOG and determination of optimum working pressure

Authors

Fuling Li, Dalian Institute of Chemical Physics Chinese Academy of Sciences
Wanfa Liu, Dalian Institute of Chemical Physics Chinese Academy of Sciences
Fang Chen, Dalian Institute of Chemical Physics Chinese Academy of Sciences
Bin Li, Dalian Institute of Chemical Physics Chinese Academy of Sciences
Wenwu Chen, Dalian Institute of Chemical Physics Chinese Academy of Sciences
Xueqin Song, Dalian Institute of Chemical Physics Chinese Academy of Sciences
Shuyuan Wu, Dalian Institute of Chemical Physics Chinese Academy of Sciences
Guosheng Lu, Dalian Institute of Chemical Physics Chinese Academy of Sciences
Mingjun Shao, Dalian Institute of Chemical Physics Chinese Academy of Sciences
Bailing Yang, Dalian Institute of Chemical Physics Chinese Academy of Sciences
Qi Zhuang, Dalian Institute of Chemical Physics Chinese Academy of Sciences

Document Type

Article

Publication Date

5-1-1997

Abstract

The relationship of utilization of Cl2 and O2 ('δ) yield versus SOG total working pressure was studied experimentally. Simple theoretical analysis was performed. The result indicates that the optimum Cl2 partial pressure is 2.13 kPa.

Publication Source (Journal or Book title)

Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams

First Page

249

Last Page

252

Recommended Citation

Li, F., Liu, W., Chen, F., Li, B., Chen, W., Song, X., Wu, S., Lu, G., Shao, M., Yang, B., & Zhuang, Q. (1997). Experimental study of rotating disk type SOG and determination of optimum working pressure. Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 9 (2), 249-252. Retrieved from https://repository.lsu.edu/ag_exst_pubs/1134