Atomic layer deposition of ZnO on Cu-nanoclusters for methanol synthesis

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The properties of ALD-grown ZnO thin films on Cu clusters supported on ZnO (10 1̄ 0) have been studied with scanning tunneling and scanning electron microscopy in combination with angle-resolved x-ray photoelectron spectroscopy. Deposition at room temperature of two monolayers of Cu on ZnO (10 1̄ 0) results in metallic Cu0 clusters ∼8 nm wide by 1.4 nm high. Higher coverages of 15 ML results in a similar morphology, with slightly larger cluster sizes. Following air-exposure and ALD-growth of two cycles of ZnO, the Cu exhibits Cu+ species characteristic of Cu2O and the thin ZnO coating is hydroxylated. Electrochemical studies of ALD ZnO coatings on Cu suggest that they are more active for CO2 reduction. © 2013 American Vacuum Society.

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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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