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We demonstrate a femtosecond enhancement cavity with a crossed-beam geometry for efficient generation and extraction of extreme-ultraviolet (XUV) frequency combs at a 154 MHz repetition rate. We achieve a record-high out-coupled power of 600 μW, directly usable for spectroscopy, at a wavelength of 97 nm. This corresponds to a >60% out-coupling efficiency. The XUV power scaling and generation efficiency are similar to that achieved with a single Gaussian-mode fundamental beam inside a collinear enhancement cavity. The noncollinear geometry also opens the door for the generation of isolated attosecond pulses at >100 MHz repetition rate.

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Physical Review Letters