Modeling and fabrication of a micro thermocouple array
Document Type
Conference Proceeding
Publication Date
1-1-2006
Abstract
A prototype micro thermocouple array, to detect the temperature change within the neighborhood of a single cell, was produced as a proof of concept. Thermal modeling was performed to determine feasibility of the design and parametrically evaluate dimensions. The device consisted of a 3×3 array of type-T thermocouple junctions (copper and constantan), spaced 50 μm apart. A micro-fabricated wiring layer, intermediate post layer, and connecting junction layer were used. The intermediate post layer was designed to decrease the effect of the thermocouple wiring layer on the cell freezing response. Copyright © 2006 by ASME.
Publication Source (Journal or Book title)
American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Recommended Citation
Cygan, A., Kardak, A., Patterson, D., Podhala-Murphy, E., Devireddy, R., & Murphy, M. (2006). Modeling and fabrication of a micro thermocouple array. American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS https://doi.org/10.1115/IMECE2006-15247