Fabrication of nanostructures on curved surfaces using PDMS stamp

Document Type

Conference Proceeding

Publication Date

11-26-2009

Abstract

We report on a simple and effective process that allows direct imprinting of micro- and nanostructures on non-flat surfaces using flexible polymer stamps. Pattern imprinting was tried using a UV-curable polymer blend containing poly(propylene glycol) diacrylate, trimethylolpropane triacrylate and a photoinitiator. The UV-resist was dispensed manually on convex and concave surfaces of a glass lens and a concave surface of poly(methyl methacrylate). A thin, flexible polymer stamp was produced using polydimethylsiloxane (PDMS) by spin coating on a Si master containing micro/nanogratings. This PDMS stamp was used to conformally mold the UV resin on non-planars surfaces. With this method, we have successfully demonstrated micro- and nanostructures down to 300 nm wide gratings, as confirmed by scanning electron microscopy and atomic force microscopy. The process so developed will fill the gap in current micro- and nanofabrication technologies in that most of the technologies allow for patterning only on planar substrates.

Publication Source (Journal or Book title)

Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009

First Page

448

Last Page

451

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