Nanostructuring curved surfaces using a flexible stamp

Document Type

Conference Proceeding

Publication Date

12-1-2009

Abstract

We report on a simple and effective process that allows direct imprinting of micro- and nanostructures on non-flat surfaces. A thin polydimethylsiloxane (PDMS) stamp having micro/nanogratings was placed between a metallic bar with a trapezoidal cross section or a metallic pellet and a flat polymethyl methacrylate (PMMA) substrate, followed by hot embossing at 200°C. During the hot embossing process, the metallic bar/pellet is pushed into the PMMA sheet forming a millimeter scale channel or a curved surface. Due to the presence of the PDMS stamp between the metallic object and the substrate, micro/nanostructures are produced into the channel or over the curved surface. With this method, we have successfully demonstrated micro- and nanostructures down to 300 nm wide gratings on non-flat substrates, as confirmed by scanning electron microscopy and atomic force microscopy. The process so developed will fill the gap in current micro- and nanofabrication technologies in that most of the technologies allow for patterning only on planar substrates. Copyright © 2009 by ASME.

Publication Source (Journal or Book title)

Proceedings of the 7th International Conference on Nanochannels, Microchannels, and Minichannels 2009, ICNMM2009

First Page

481

Last Page

484

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