Ti atomic bonding environment in Ti-containing hydrocarbon coatings
Document Type
Article
Publication Date
9-1-2000
Abstract
We report characterization of the average Ti atomic bonding environment in Ti-containing hydrocarbon (Ti-C:H) coatings by x-ray absorption near edge structure (XANES) spectroscopy, extended x-ray absorption fine structure (EXAFS) spectroscopy, and high-resolution transmission electron microscopy (TEM). Ti-C:H coatings have been synthesized in a hybrid chemical vapor deposition/physical vapor deposition deposition system, which combines inductively coupled plasma and sputter deposition. Combining x-ray absorption spectroscopy with high resolution TEM imaging, we have determined that the dissolution limit of Ti atoms in an amorphous hydrocarbon (a-C:H) matrix is between 0.9 and 2.5 atomic percent. At Ti compositions >2.5 at. %, XANES and EXAFS data indicate that the average Ti atomic bonding environment in Ti-C:H resembles that in cubic B1-TiC, consistent with direct TEM observation of the precipitation of TiC nanocrystallites in an a-C:H matrix. Beyond the Ti dissolution limit, Ti-C:H coatings are in fact TiC/a-C:H nanocomposites, in which the TiC nanoprecipitates are very much bulk like. © 2000 American Institute of Physics.
Publication Source (Journal or Book title)
Journal of Applied Physics
First Page
2415
Last Page
2422
Recommended Citation
Meng, W., Tittsworth, R., Jiang, J., Feng, B., Cao, D., Winkler, K., & Palshin, V. (2000). Ti atomic bonding environment in Ti-containing hydrocarbon coatings. Journal of Applied Physics, 88 (5), 2415-2422. https://doi.org/10.1063/1.1287121