Microstructure and mechanical properties of Ti-Si-N coatings

Document Type

Article

Publication Date

1-1-2002

Abstract

A series of Ti-Si-N coatings with 0 < Si < 20 at.% were synthesized by inductively coupled plasma assisted vapor deposition. Coating composition, structure, atomic short-range order, and mechanical response were characterized by Rutherford backscattering spectrometry, transmission electron microscopy, x-ray absorption near-edge structure spectroscopy, and instrumented nanoindentation. These experiments show that the present series of Ti-Si-N coatings of a mixture of nanocrystalline titanium nitride (TiN) and amorphous silicon nitride (a-Si:N); i.e., they are TiN/a-Si:N ceramic/ceramic nanocomposites. The hardness of the present series of coatings was found to be less than 32 GPa and to vary smoothy with the Si composition.

Publication Source (Journal or Book title)

Journal of Materials Research

First Page

2628

Last Page

2632

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