Structure and mechanical properties of Ti-Si-N ceramic nanocomposite coatings
Document Type
Article
Publication Date
1-30-2003
Abstract
We have synthesized a series of Ti-Si-N coatings with 0-20 at.% Si by high-density plasma-assisted vapor phase deposition. Composition, structure and atomic short-range order were characterized by Rutherford backscattering spectrometry (RBS), transmission electron microscopy (TEM), θ-2θ X-ray diffraction (XRD) and X-ray absorption near-edge structure (XANES) spectroscopy. The mechanical properties of these coatings were characterized by instrumented nanoindentation and compared to those of B1-TiN. Our experiments show that the present series of Ti-Si-N coatings are nanocomposites, consisting of a nm-scale mixture of crystalline titanium nitride (TiN) and amorphous silicon nitride (a-Si:N). The hardness of the present series of Ti-Si-N coatings was found to be less than 32 GPa. © 2002 Elsevier Science B.V. All rights reserved.
Publication Source (Journal or Book title)
Surface and Coatings Technology
First Page
251
Last Page
259
Recommended Citation
Meng, W., Zhang, X., Shi, B., Jiang, J., Rehn, L., Baldo, P., & Tittsworth, R. (2003). Structure and mechanical properties of Ti-Si-N ceramic nanocomposite coatings. Surface and Coatings Technology, 163-164, 251-259. https://doi.org/10.1016/S0257-8972(02)00603-5