Conformal deposition of Ti-C:H coatings over high-aspect-ratio micro-scale structures and tribological characteristics
Document Type
Article
Publication Date
5-1-2003
Abstract
Results on conformal deposition of Ti-containing hydrocarbon (Ti-C:H) coatings over Ni high-aspect-ratio micro-scale structures (HARMs) fabricated by the lithography, electroplating and molding (LIGA) technique are reported. Using a high-density plasma assisted hybrid chemical vapor deposition/physical vapor deposition technique, it is demonstrated that conformal Ti-C:H deposition can be achieved over HARMs with ∼ 1000 μm in height and ∼ 220 μm in mutual spacing. Surface roughness and tribological characteristics of Ti-C:H coatings during unlubricated sliding contact with 52100 steel balls are studied with atomic force microscopy, micro-Raman scattering, and optical microscopy on macro-scale samples. It is shown that unlubricated sliding between Ti-C:H and 52100 steel is significantly influenced by the composition of the Ti-C:H coating. © 2003 Elsevier Science B.V. All rights reserved.
Publication Source (Journal or Book title)
Thin Solid Films
First Page
46
Last Page
54
Recommended Citation
Cao, D., Meng, W., Simko, S., Doll, G., Wang, T., & Kelly, K. (2003). Conformal deposition of Ti-C:H coatings over high-aspect-ratio micro-scale structures and tribological characteristics. Thin Solid Films, 429 (1-2), 46-54. https://doi.org/10.1016/S0040-6090(03)00275-X