Conformal deposition of Ti-C:H coatings over high-aspect-ratio micro-scale structures and tribological characteristics

Document Type

Article

Publication Date

5-1-2003

Abstract

Results on conformal deposition of Ti-containing hydrocarbon (Ti-C:H) coatings over Ni high-aspect-ratio micro-scale structures (HARMs) fabricated by the lithography, electroplating and molding (LIGA) technique are reported. Using a high-density plasma assisted hybrid chemical vapor deposition/physical vapor deposition technique, it is demonstrated that conformal Ti-C:H deposition can be achieved over HARMs with ∼ 1000 μm in height and ∼ 220 μm in mutual spacing. Surface roughness and tribological characteristics of Ti-C:H coatings during unlubricated sliding contact with 52100 steel balls are studied with atomic force microscopy, micro-Raman scattering, and optical microscopy on macro-scale samples. It is shown that unlubricated sliding between Ti-C:H and 52100 steel is significantly influenced by the composition of the Ti-C:H coating. © 2003 Elsevier Science B.V. All rights reserved.

Publication Source (Journal or Book title)

Thin Solid Films

First Page

46

Last Page

54

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