Semester of Graduation

Spring 2023


Master of Science in Mechanical Engineering (MSME)


Department of Mechanical and Industrial Engineering

Document Type



A series of amorphous hydrogenated chromium containing diamond-like carbon films were deposited on 316 stainless steel substrates with a chromium interlayer through inductively coupled plasma assisted direct current magnetron sputtering. Details on the deposition process of these films are discussed. The film is characterized using scanning electron microscopy, X-ray photoelectron spectroscopy, X-ray diffraction, energy dispersive spectroscopy, and transmission electron microscopy. The coating hardness and indentation modulus is measured by instrumented nanoindentation. The coefficient of friction and the upper bound of the coating wear coefficient is measured using the pin-on-disk method. The fracture toughness of the diamond-like carbon film and a chromium film were measured to be 0.80 MPa m1/2 and 2.50 MPa m1/2 respectively. The fracture toughness of the interface between the coating and the substrate were measured by bending pre-notched microcantilever beams. The fracture surface of the cantilever beams was analyzed to measure the location of the crack propagation. The fracture toughness of the interface was found to vary approximately linearly between that of the diamond-like carbon film and that of chromium. The correlation was observed to depend on the area fraction of the fracture surface that occurred in the chromium interlayer.



Committee Chair

Meng, Wen Jin