MEMS-based resonant sensor with uniform mass sensitivity

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Conference Proceeding

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MEMS-based resonant mass sensors have been extensively studied as biological and chemical sensor. Most of these sensors have utilized a cantilever structure, and these cantilever resonant mass sensors have a spatially non-uniform mass sensitivity. In this study, a silicon MEMS-based resonant mass sensor with a spatially uniform mass sensitivity is developed. The sensor is composed of a platform for the target attachment and four half-folded springs. The novel structure generates a vertical displacement of the platform, which leads to the uniform mass sensitivity. The extracted mass of a same bead on different places shows a standard deviation of 1.4%. ©2009 IEEE.

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TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

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