MEMS-based resonant sensor with uniform mass sensitivity
MEMS-based resonant mass sensors have been extensively studied as biological and chemical sensor. Most of these sensors have utilized a cantilever structure, and these cantilever resonant mass sensors have a spatially non-uniform mass sensitivity. In this study, a silicon MEMS-based resonant mass sensor with a spatially uniform mass sensitivity is developed. The sensor is composed of a platform for the target attachment and four half-folded springs. The novel structure generates a vertical displacement of the platform, which leads to the uniform mass sensitivity. The extracted mass of a same bead on different places shows a standard deviation of 1.4%. ©2009 IEEE.
Publication Source (Journal or Book title)
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Park, K., & Bashir, R. (2009). MEMS-based resonant sensor with uniform mass sensitivity. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1956-1958. https://doi.org/10.1109/SENSOR.2009.5285673