Direct characterization of hydrodynamic loading on a microelectromechanical systems microstructure

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Hydrodynamic loading greatly affects resonant characteristic of microfabricated structures immersed in a viscous fluid. In this letter, we demonstrate a technique to measure hydrodynamic loading on a MEMS resonator in a broad range of actuation frequency. The extracted hydrodynamic loading is in a good agreement with an analytical solution of an oscillating sphere, and a highly accurate model is developed for the hydrodynamic loading of the resonator. The developed technique can directly characterize the hydrodynamic loading of a microstructure with an arbitrary geometry and will facilitate the optimization of MEMS devices and AFM probes operating in a viscous fluid.

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Applied Physics Letters

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