Nanofluidic channel based single molecular sensors in polymer substrate fabricated by novel nanoimprinting processes
Document Type
Conference Proceeding
Publication Date
11-9-2010
Abstract
A nanochannel based single molecular sensor was fabricated in poly(methyl methacrylate) substrate by a single step imprinting process with a polymer stamp. The sensor structure consists of hierarchical multiscale patterns of an array of 20 nm deep and 50μm long nanochannels and microfluidic networks. In contrast to nanofluidic devices fabricated by high-end nanofabrication tools such as focused ion beam milling and electron beam lithography, this direct imprint process is more desirable for efficient and low cost fabrication. Moreover, the use of high throughput molding or nanoimprint lithography process has been rather limited to the patterns in a thin polymer resist layer coated on a rigid Si or quartz substrate. in the fabrication of nanochannel sensors due to the reduction of stress generated during imprinting, this polymer stamp imprinting process can also reduce the deformation (warping) in molded substrates, and prevent the damage of expensive nanostructured stamp as well.
Publication Source (Journal or Book title)
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
First Page
468
Last Page
471
Recommended Citation
Wu, J., Rattikan Chantiwas., Soper, S., & Park, S. (2010). Nanofluidic channel based single molecular sensors in polymer substrate fabricated by novel nanoimprinting processes. Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010, 2, 468-471. Retrieved from https://repository.lsu.edu/mechanical_engineering_pubs/1947