Micromolding of Pb and Zn with surface engineered LiGA mold inserts
Document Type
Conference Proceeding
Publication Date
1-1-2002
Abstract
Molding of Pb and Zn metal plates with LiGA (Lithographie, Galvanoformung, Abformung) fabricated Ni micro-scale mold inserts was carried out with as fabricated Ni inserts and Ni inserts conformally coated with Ti-containing hydrocarbon (Ti-C:H) coatings. The molding performance was characterized using scanning electron microscopy (SEM) and energy-dispersive spectroscopy (EDS), in terms of the generated features on the metal plates as well as the inserts condition after molding. The present results demonstrate that, in cases where significant metal/insert chemical interactions exist, surface modification of the mold insert is necessary to obtain satisfactory performance. Furthermore, conformal deposition of suitable engineered ceramic coatings onto Ni micro-scale mold inserts is effective for high temperature micromolding of reactive metals.
Publication Source (Journal or Book title)
Materials Research Society Symposium - Proceedings
First Page
239
Last Page
244
Recommended Citation
Cao, D., Guidry, D., Meng, W., & Kelly, K. (2002). Micromolding of Pb and Zn with surface engineered LiGA mold inserts. Materials Research Society Symposium - Proceedings, 741, 239-244. https://doi.org/10.1557/proc-741-j10.5