Thermal expansion of Ti-containing hydrogenated amorphous carbon nanocomposite thin films
Document Type
Conference Proceeding
Publication Date
11-8-2004
Abstract
The effective coefficients of thermal expansion (CTE) of Ti-containing hydrogenated amorphous carbon (Ti-C:H) thin films were measured. Ti-C:H thin films with compositions ranging from nearly pure a-C:H to nearly pure TiC were deposited on Si(100) substrates. Effective CTEs were determined from temperature induced changes in the curvature of film/substrate assemblies. Measured effective CTE values for Ti-C:H are ∼5.7×10 -6 K -1, and show little dependence on the Ti composition. © 2004 American Institute of Physics.
Publication Source (Journal or Book title)
Applied Physics Letters
First Page
4352
Last Page
4354
Recommended Citation
Shi, B., Meng, W., & Daulton, T. (2004). Thermal expansion of Ti-containing hydrogenated amorphous carbon nanocomposite thin films. Applied Physics Letters, 85 (19), 4352-4354. https://doi.org/10.1063/1.1814800