Metal micromolding: Further experiments and preliminary finite element analysis

Document Type

Article

Publication Date

3-1-2007

Abstract

We report results of instrumented microscale compression molding experiments on Al with Ta mold inserts. The Ta inserts have high-aspect-ratio microscale structures fabricated by micro-electrical-discharge-machining. These microscale structures were further surface engineered by electrochemical polishing, followed by deposition of a conformal amorphous hydrogenated carbon based coating. The molding response of Al, in terms of molding force versus insert displacement, was measured in situ with a high-vacuum, instrumented, compression molding apparatus, and rationalized with a simple model on the mechanics of molding. Molding response was further studied numerically through finite element analysis. © Springer-Verlag 2007.

Publication Source (Journal or Book title)

Microsystem Technologies

First Page

495

Last Page

501

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