Metal micromolding: Further experiments and preliminary finite element analysis
Document Type
Article
Publication Date
3-1-2007
Abstract
We report results of instrumented microscale compression molding experiments on Al with Ta mold inserts. The Ta inserts have high-aspect-ratio microscale structures fabricated by micro-electrical-discharge-machining. These microscale structures were further surface engineered by electrochemical polishing, followed by deposition of a conformal amorphous hydrogenated carbon based coating. The molding response of Al, in terms of molding force versus insert displacement, was measured in situ with a high-vacuum, instrumented, compression molding apparatus, and rationalized with a simple model on the mechanics of molding. Molding response was further studied numerically through finite element analysis. © Springer-Verlag 2007.
Publication Source (Journal or Book title)
Microsystem Technologies
First Page
495
Last Page
501
Recommended Citation
Cao, D., Jiang, J., Meng, W., & Sinclair, G. (2007). Metal micromolding: Further experiments and preliminary finite element analysis. Microsystem Technologies, 13 (5-6), 495-501. https://doi.org/10.1007/s00542-006-0200-5