Replication of metal-based microscale structures

Authors

J. Jiang, LSU College of Engineering
W. J. Meng, LSU College of Engineering
G. B. Sinclair, LSU College of Engineering
C. O. Stevens, High Temperature Materials Laboratory
E. Lara-Curzio, High Temperature Materials Laboratory

Document Type

Conference Proceeding

Publication Date

3-26-2007

Abstract

Technologies capable of economical mass production of metal-based high-aspect-ratio microscale structures (HARMS), with structural heights of several hundred μm offer the potential to realize many metal-based microdevices. In this paper, our recent research on high-temperature microscale compression molding of metal-based HARMS from surface-engineered, microscale, refractory metal inserts is summarized. © 2007 American Institute of Physics.

Publication Source (Journal or Book title)

AIP Conference Proceedings

First Page

1451

Last Page

1455

Recommended Citation

Jiang, J., Meng, W., Sinclair, G., Stevens, C., & Lara-Curzio, E. (2007). Replication of metal-based microscale structures. AIP Conference Proceedings, 879, 1451-1455. https://doi.org/10.1063/1.2436338