Thickness dependence of flow stress of Cu thin films in confined shear plastic flow
Document Type
Article
Publication Date
9-10-2014
Abstract
Compression loading on CrN/Cu/Si(100) micropillars containing 45°-inclined interfaces yielded unequivocal evidence of shear plastic flow within Cu thin films confined between non-deforming Si and CrN. Confined shear plastic flow occurred over Cu thicknesses between ~100 and 1200 nm, with a monotonically increasing flow stress as the thickness decreases. The demonstration of a significant dependence of the shear flow stress on the confined Cu film thickness offers a new example of scale-dependent plasticity, and a new experimental test case for non-local plasticity theories.
Publication Source (Journal or Book title)
MRS Communications
First Page
129
Last Page
133
Recommended Citation
Mu, Y., Chen, K., & Meng, W. (2014). Thickness dependence of flow stress of Cu thin films in confined shear plastic flow. MRS Communications, 7 (1), 129-133. https://doi.org/10.1557/mrc.2014.26