Model-based framework for ternary alloy electrodeposition processes: Model validations and parameter estimation

Document Type

Conference Proceeding

Publication Date

1-1-2007

Abstract

This paper deals with the use of a model-centric approach towards the definition of optimal electrodeposition schemes in the fabrication of nanometric multilayers materials with tailored properties. A model for such complex systems is used and validated against experimental data. These mathematical deposition models range from single depositions to alloys, and have the characteristic of having large number of parameters not available from literature or experiments. In this work the capabilities of modern modelling, simulation and optimization environments is exploited both for model development and parameter estimation and will be used in further optimization studies for fabrication improvement and control.

Publication Source (Journal or Book title)

IFAC Proceedings Volumes (IFAC-PapersOnline)

First Page

227

Last Page

232

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