Integration and application of electrochemically-etched silicon nanowires

Document Type

Conference Proceeding

Publication Date

1-1-2009

Abstract

Silicon nanowires (SiNW) are fabricated through electroless etching of single crystal silicon. The nanowires are separated from substrate, deposited onto electrodes and annealed. Nanowire silicidation methods and analysis of silicides including electrical characterization, SEM, TEM and sputter XPS, and XANES are considered. © The Electrochemical society.

Publication Source (Journal or Book title)

ECS Transactions

First Page

237

Last Page

244

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