Integration and application of electrochemically-etched silicon nanowires
Document Type
Conference Proceeding
Publication Date
1-1-2009
Abstract
Silicon nanowires (SiNW) are fabricated through electroless etching of single crystal silicon. The nanowires are separated from substrate, deposited onto electrodes and annealed. Nanowire silicidation methods and analysis of silicides including electrical characterization, SEM, TEM and sputter XPS, and XANES are considered. © The Electrochemical society.
Publication Source (Journal or Book title)
ECS Transactions
First Page
237
Last Page
244
Recommended Citation
Xu, W., & Flake, J. (2009). Integration and application of electrochemically-etched silicon nanowires. ECS Transactions, 16 (3), 237-244. https://doi.org/10.1149/1.2982561
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