Deep electrochemical etching of silicon

Authors

Joel Nino G. Bugayong
Purnima Narayanan
John C. Flake

Document Type

Conference Proceeding

Publication Date

12-1-2009

Publication Source (Journal or Book title)

AIChE Annual Meeting, Conference Proceedings

Recommended Citation

Bugayong, J., Narayanan, P., & Flake, J. (2009). Deep electrochemical etching of silicon. AIChE Annual Meeting, Conference Proceedings Retrieved from https://repository.lsu.edu/chem_engineering_pubs/411